| 摘要 |
PURPOSE:To make the attachment of marking pens easy and facilitate the recognition of the marking by providing a marking equipment apart from measurement and test equipments. CONSTITUTION:A wafer supplied to this equipment has been subjected to the prescribed tests by test equipments. A wafer transfer equipment 6 is set on a movable table 5 while attracting and holding the wafer. The table 5 is moved from the position C to the position D. The wafer table at the position D is moved to the marking position E to the left. At the position E, marking pens 10 and the detecting part 11 of a marking detector are attached downward and the table is so moved as to have a starting chip (1) of the wafer positioned beneath the pen 10. Then the marking is performed when necessary and the detector detects whether the marking has been performed or not. With this constitution, the marking pens can be attached easily and the marking can be recognized. |
