PLANAR MAGNETRON SPUTTERING DEVICE,申请号GB19840023020-传众专利搜索

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发明名称	PLANAR MAGNETRON SPUTTERING DEVICE
摘要
申请公布号	GB8423020(D0)	申请公布日期	1984.10.17
申请号	GB19840023020	申请日期	1984.09.12
申请人	BRITISH COLUMBIA, UNIVERSITY OF	发明人
分类号	C23C14/36;C23C14/35;H01J37/34	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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