| 摘要 |
PURPOSE:To obtain a film which has magnetic anisotropy and has the recording direction along the easy magnetization axis by a method wherein on a substrate, whose surface roughness along X-axis and surface roughness along Y-axis are different, a ferromagnetic film is formed by a vacuum film forming method from the inclined direction. CONSTITUTION:A substrate 1, for instance an aluminum substrate subjected to Alumite treatment, whose surface roughness along X-axis is finer than surface roughness along Y-axis by approximately 10 times, is introduced. A sputtering equipment 5, in which a pair of cathodes 2 are facing each other and targets 3 are attached to the cathodes 2 and to which external coils 4 are provided to generate a magnetic field vertical to the cathodes 2, is applied to the substrate 1. The substrate 1 is so provided as to make its X-axis direction perpendicular to the surface of the target 3. A pair of metal targets which contain Fe as a main component and Co, Ti and Cu are used and reactive sputtering is performed in an atmosphere containing O2 to form an alpha-Fe2O3 film on the substrate 1. The alpha-Fe2O3 film is heated in a reducing atmosphere containing H2 to be reduced and again heated in the air to be oxidized. The a gamma-Fe2O3 film can be obtained. |
