发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS
摘要 PURPOSE:To remove the burden to the operator for transferring magazines and improve utilization efficiency of the magazines by a method wherein a magazine containing works and a vacant magazine are automatically transferred successively at the loading side and the unloading side of a processing equipment. CONSTITUTION:Works, i.e. chips 5, contained in a magazine 3 at the loading side, are transferred to a bonding head 2 to be processed and transferred to the unloading side to be contained in a magazine 4. A magazine 3c is placed adjacent to a magazine 3b, which contains the works to be processed and from which the works are taken out, and shifted to the transfer position as a vacant magazine 3a after all works are taken out. The shifting is performed by a control equipment operating a cylinder, a conveyer or the like. The vacant magazine 3a is transferred to the unloading side by a transfer mechanism which has a chuck 7 and a guide 8. At the unloading side, the magazines are shifted in the same way as at the loading side.
申请公布号 JPS59181544(A) 申请公布日期 1984.10.16
申请号 JP19830055542 申请日期 1983.03.31
申请人 TOSHIBA KK 发明人 HAZAMANO SHIGEKI
分类号 H01L21/677;H01L21/60 主分类号 H01L21/677
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