| 摘要 |
PURPOSE:To enable a workpiece to be positioned and fixed in vacuum by providing a mechanism for positioning, fixing and releasing the workpiece on a device for conveying a substrate and the like in the vacuum without the breackdown of the vacuum and the generation of discharge gas, dust, and foreign matter. CONSTITUTION:A conveying arm 10 for bearing and conveying a substrate 1 is fixed on a hollow shaft 11 vertically movable and rotatable, which hollow shaft 11 is rotatably supported on a bracket 14 via ball bearings 12, 13. On the hollow shaft 11, a vertically movable shaft 22 is arranged, the upper end of which shaft 22 is fixed on one end of flange 24 of flanges 24, 25 welded and fixed on both ends of a bellows 23 while the other flange 25 is fixed on the upper end of the hollow shaft 11. Positioning pins 27, 28 and a positioning lever 29 forcing these pins 27, 28 make close contact with the substrate 1 are provided on the bearing part of the substrate 1 of the conveying arm 10. The positioning lever 29 is rotatably mounted on a supporting pin 30, and on one end of which a tension spring 31 is hooked and on the other end of which one end of a rope 32 is fixed. |
