| 摘要 |
PURPOSE:To measure the leakage of a body to be tested with high precision by correcting a measured value of probe gas concentration obtained by a concentration measuring means by using probe gas whose concentration or leakage is already known. CONSTITUTION:A controller 23 closes a clean-up gas supply valve 17 and also opens a sampling valve 13 to guide some of the gas in a storage container 10 to a leak detector 7 a specific time T after the 1st measurement of the probe gas concentration in the storage container 10 while the sensitivity correction of the leak detector 7 is completed. An arithmetic device 21 inputs the measured value C1' of gas concentration of the supplied gas obtaind by the leak detector 7 and also reads a measured value C0' stored previously to calculate the background value of the containr 10 and the real value of the gas in the container corresponding to the background value, thereby calculating the leakage of the body 3 to be tested by an equation. In the figure, C2 and C3 are different probe gas concentration values which are already known, C2' and C3' are measured values by the leak detectors 7, and V is the actual capacity of the storage container 10. |
