| 摘要 |
PURPOSE:To improve sensitivity of a resist film by bringing an acrylate type polymer resist film into contact with <=3C alcohol in advance. CONSTITUTION:An acrylate type polymer resin film is imagewise exposed to high energy rays, and brought into contact with <=3C alcohol immediately after the exposure or further after storage. As said alcohol, especially isopropanol has a peculiar effect for improving sensitivity, and other similar alcohols or the like, such as n-butanol, isobutanol, amyl alcohol, or cyclohexanone, has little effect. For example, when a sample is immersed in isopropanol at 23 deg.C 5min as pretreatment, the sensitivity of the resist film is found to have 0.29X10<-6>C/cm<2> but 0.52X10<-6>C/cm<2> without pretreatment. |
