| 摘要 |
PURPOSE:To estimate the quantity of stored material from the outside of a container which can not be seen through by coupling a gas induction pipe and a gas lead-out pipe of an organic metal container with a transparent pipe and disposing an object in the pipe, which is adapted to avoid passing of gas and move corresponding to a difference in pressure. CONSTITUTION:When a carrying gas such as hydrogen gas is introduced in an organic metal liquid 4 from a gas induction pipe 2, bubbles of hydrogen gas rise in the liquid, and meanwhile vapor of organic metal is taken in the bubbles of hydrogen gas to be sent to a semiconductor growth reaction portion through a gas lead-out pipe 3. When gas is thus sent, with the flow of organic metal, that is, carrying gas constant for the semiconductor growth operation, there is a difference in pressure corresponding to the weight of organic metal from the liquid surface of organic metal liquid 4 in the container 1 to the depth of the lower opening portion of the gas induction pipe 2 between the gas induction pipe 2 and the gas lead-out pipe 3. Corresponding to such difference in pressure, an object 8 is moved in a sapphire pipe 6. Accordingly, the position of the object 8 is observed to estimate the quantity of liquid stored in the container 1. |
