| 摘要 |
PURPOSE:To perform a uniform film formation processing by providing a means, which reduces the coherence of a laser light, in the laser optical path between a laser light source and a reaction chamber to prevent the generation of an interference pattern. CONSTITUTION:The device is so constituted that a laser light 2 emitted from a laser oscillator in the direction of an arrow A is condensed by a matching lens 13 and is led to an optical fiber 14 consisting of quartz, and the optical fiber 14 is wound spirally. The light emitted from the optical fiber 14 is made parallel by a collimating lens 15 and is led toward a quartz lens in the direction of an arrow B. Since the laser light 2 is reflected repeatedly irregularly in the optical fiber 14, it becomes irregular in phase gradually to lose coherence. |
