| 摘要 |
PURPOSE:To attain easily the positioning of a wafer to a screen mask print pattern by placing the wafer on a placing plate moved and turned freely within a plane and equipped with a light source irradiating the placed wafer from the rear side and irradiating light from the rear side so as to allow an electrode pattern on a substrate and its surrounding to be seen easily. CONSTITUTION:A screen mask 8 corresponding to a wafer chip pattern 15 to be printed is fitted to a screen holder 11. A hard resin board 9 is placed on the wafer placing plate 2 while being aligned to a direction in which the wafer to be printed succeedingly. Then, the screen holder 11 to which the screen mask 8 is fitted is descended so as to be overlapped on the hard resin plate 9 on the wafer placing plate 2. The hard resin board 9 is positioned with the screen mask 8 and fixed by a hard resin board placing plate 14 by moving the hard resin board 9 so as to be slided on the wafer placing plate 2 while pattern holes 16 made to the screen mask 8 and XY lines 12, 13 engraved to the hard resin board 9 are aligned by utilizing the lightness due to the light source 6 after the light source is lighted and observing the screen mask 8 from the upper part. |
