| 摘要 |
PURPOSE:To obtain an evaporation source causing little variation of temp. of proceeding evaporation by providing a vessel for a material for evaporation, a spring body for supporting the vessel which exerts a pushing up force to the vessel, and a heat source arranged above said vessel. CONSTITUTION:An evaporation source 3 is disposed beneath a cylindrical photosensitive substrate 2 which is an object to be vapor-deposited with its axis held vertically, confrontingly in a vacuum vessel 1. The evaporation source 3 supports directly a boat cell 5 for holding the material to be evaporated 4 with a spring 7 held by a fixing body 6 for the spring. The spring 7 is made of a heat-resistant spring material consisting of e.g. Ni-Co-Mo steel serving to increase the distance between the vessel and the heater above said heater 8 when the weight of the vessel is heavy due to the weight of a large amt. of the material 4 to be evaporated and to reduce the distance when the weight of the vessel becomes light by the decrease of the material to be evaporated.
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