发明名称 MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To obtain the elements having different current amplification factors without changing the pattern dimension of a transistor by a method wherein a region of the second conductivity type is provided in a region of the first conductivity type formed in an island, and, when an emitter region of the first conductivity type is formed therein, thus forming them into a bi-polar type IC, the region of the first conductivity type whose impurity concentration is higher than that of said region of the first conductivity type and lower than that of a base region. CONSTITUTION:Two N<+> type buried regions 3 are diffusion-formed in the surface layer part of a P<-> type Si substrate, an N<-> type layer 5 serving as the collector is epitaxially grown over the entire surface including said regions, which layer 5 is isolated into two regions by a P<+> type region 2 while said layer is made to include the regions 3. Next, an N<+> type collector contact region 4 is projected at the end of the region 3, and a P type base region 12 and an N<+> emitter region 14 positioned therein are provided in adjacency to said contact region. In this constitution, a shallow N type layer 10 whose concetration is higher than that of the layer 5 and lower than that of the region 12 is provided on the surface of one region 15.
申请公布号 JPS59178764(A) 申请公布日期 1984.10.11
申请号 JP19830052960 申请日期 1983.03.29
申请人 FUJITSU KK 发明人 ITOU YOSHIHARU;SASAKI ATSUSHI
分类号 H01L21/8222;H01L21/331;H01L27/082;H01L29/73 主分类号 H01L21/8222
代理机构 代理人
主权项
地址