| 摘要 |
PURPOSE:To reduce clogging of a filter, to extend a service life and to decrease the exchange frequency of the filter by washing always the surface of the filter by a part of waste water, in a filtering apparatus for reutilizing the waste water generated in the manufacture of a semiconductor instrument. CONSTITUTION:A filter 12 is provided to a main pipe 11 with an inclination having an angle e.g. 45 degrees against the flow direction of a fluid. At the side wall of the main pipe 11 on the waste water supply side and just before the filter 12, a branched pipe is attached, which has 10-20% flow rate of charged waste water, 80-90% waste water charged from the left side as shown by a figure is passed through the filter 12 and filtreted. Remaining 10-20% water is passed through the branched pipe 13 while removing fine powder attached to the filter 12 and released. Since the surface of the filter 12 is washed always by a part of the waste water,and the clogging is reduced compared with conventional ones and the life of the filter is extended and the exchange frequency of the filter 12 can be decreased.
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