A rotating liquid nitrogen cooled substrate holder.

摘要

In apparatus for rotating a substrate in a vacuum chamber having an aperture in the top wall of the chamber, there is provided a closure mounted over the aperture, the closure including magnetic means cooperating with a plurality of ferro-fluids sealed intermediate the magnetic means in the closure, and a thin wall hollow tube mounted through the centre of the closure. The thin wall hollow tube supports a work station which comprises a hollow chamber adapted to receive therein cold liquified gas at cryogenic temperatures.