| 摘要 |
PURPOSE:To enable sure working without being affected by the material of a body to be worked by providing a device for feeding a prescribed working liquid on the surface of the body and subjecting the body to laser working while evaporating >=80% the working liquid fed on the surface to be worked. CONSTITUTION:Laser light oscillated from laser oscillators 1, 2 are focused by a focusing lens 13 and the focused light is irradiated to a body 22 to be worked, by which the body 22 is worked. A working liquid feeder 16 by which a working liquid (dilute HCl, H2SO4, aq. KOH soln., aq. HF soln., hydrocarbon) is fed on the surface of the body 22 is provided. The body is subjected to laser working while >=80% the working liquid supplied on the surface is evaporated. The body is surely worked by the above-mentioned device without being affected by the material thereof. |
