| 摘要 |
PURPOSE:To obtain an excellent accuracy of line width even to a change in a minute scaling by generating a picture drawing pulse having a pulse number corresponding to the number of picture elements of a scanning line and also extending and contracting the period of the pulse to extend and contract the pattern width in the direction of scanning line. CONSTITUTION:The pattern drawing device comprising a laser light source 1, an optical modulator 2, a rotary mirror 4, and a one-dimensional moving stage 8 or the like draws a pattern by irradiating or stopping irraditing with a picture drawing beam to each picture element based on a picture drawing data when one scanning line of the picture drawing beam is formed into the picture element. A data modulating section 15 controlling the optical modulator 2 generates a picture drawing pulse train having the pulse number corresponding to the picture element number in the scanning line within one scanning period and has a function to extend and contract the period of at least two pulses to the period of other pulses and draws a picture with good accuracy of position even against the extension and contraction of a photo film. |
