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发明名称
CHEMICAL TREATING DEVICE FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPS59176572(A)
申请公布日期
1984.10.05
申请号
JP19830050839
申请日期
1983.03.26
申请人
MITSUBISHI DENKI KK
发明人
YAMAZAKI MASATOSHI
分类号
F26B5/08;H01L21/304;H01L21/306
主分类号
F26B5/08
代理机构
代理人
主权项
地址
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