VERFAHREN ZUR HERSTELLUNG EINES MEHRKOMPONENTENDUENNFILMS, INSBESONDERE EINES AMORPHEN MEHRKOMPONENTENSILICIUMDUENNFILMS

摘要

A multicomponent amorphous silicon film suitable for a solar cell is produced at a higher deposition rate by a novel process comprising using jointly a sputtering method and a plasma CVD method within a pressure range of not lower than a pressure at which the maximum film formation rate is given in the sputtering method.