METHOD OF PRODUCING A NEUTRALISED LOW ENERGY ION BEAM, NEUTRALISED LOW ENERGY ION BEAM GENERATOR AND METHOD OF PRODUCING A NEUTRILISED HIGH ENERGY ION BEAM
摘要
申请公布号
EP0093831(A3)
申请公布日期
1984.10.03
申请号
EP19830100688
申请日期
1983.01.26
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;KAUFMAN, HAROLD RICHARD
发明人
HARPER, JAMES MCKELL EDWIN;HEIBLUM, MORDEHAI;KAUFMAN, HAROLD RICHARD
