| 摘要 |
<p>A charged particle energy analyzer comprises a source (8) for generating radiation to be incident on a sample (10) so as to emit charged particles from the sample, a low energy pass reflection filter for selectively reflecting the charged particles having energy lower than a first value, a high energy pass transmission filter (G<5>) for selectively transmitting the charged particles having energy lower than a second value. The low energy pass filter comprises a reflector (4) and a first grid (G<3>). The reflector (4) is a spheroid mirror having two complex focuses, in a symmetrical manner, at which the sample and a detector are disposed. The detector (7) detects the selected charged particles.</p> |
