| 摘要 |
PURPOSE:To effect reduction of error caused by variation of distances between work and system, elimination of restriction of resolving power and stroke and miniaturization of detecting system capable of speed detection based on a single point, by recognition of true speed of work in true time through oscillating frequency of voltage-controlled oscillator. CONSTITUTION:When frequencies 20 of 3-phase sine-wave voltage are set in such a way that when a dielectric work 16 is displaced in a direction 21, a thrust speed characteristic of 3phiSLIM17 represents a line 25 provided with a synchronous speed Vo, if the displacement speed of the dielectric work 16 is VA, then the thrust speed characteristic point of 3phiSLIM17 becomes a point A and a thrust force DELTAFA is generated to accelerate the dielectric work 16. At this moment, when displacement of 3phiSLIM17 becomes available along a forwarding direction of dielectric work 16 and a load convertor 18a is fixed to a surface intersecting with the forwarding direction through a right angle and an output voltage is generated in proportion to the displacement of 3phiSLIM17, a force equal and opposite with and to a thrust force produced in 3phi SLIM17 is made to act on the load convertor 18a. Consequently, the output voltage 19 of the load convertor 18a becomes proportional to the thrust force produced in 3phi SLIM17. |
