发明名称 Method of controlling the supercurrent of a Josephson junction device
摘要 A novel method of depositing the oxide barrier junction on a base electrode of a Josephson junction device is provided. An ionized oxygen plasma region is generated juxtaposed the surface of the base electrode to be oxidized. The pressure of the oxygen in the vacuum chamber is held at a predetermined high pressure where the zero voltage supercurrent is found to be independent of oxygen pressure variations and the flow of oxygen through the vacuum chamber is stabilized at the optimum minimum necessary for growth of the oxide barrier junction. The oxide barrier junctions so produced have consistent and predictable supercurrent densities.
申请公布号 US4474828(A) 申请公布日期 1984.10.02
申请号 US19830480523 申请日期 1983.03.30
申请人 SPERRY CORPORATION 发明人 YOUNG, PETER L.;JOSEPHS, RICHARD M.;COLEMAN, JOHN A.
分类号 C04B41/87;H01L39/24;(IPC1-7):H01L39/22 主分类号 C04B41/87
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