| 摘要 |
PURPOSE:To provide an amorphous alloy having high hardness and high corrosion resistance, by discharging an Fe-Cr-P-C base alloy into a plasma region in a gaseous state while adhering and depositing the gaseous alloy to the surface of an opposed substrate in an accelerated state to solidify the same thereon. CONSTITUTION:A target electrode 6 and an opposed electrode 5 are provided in the plasma generating region 78 in a hermetically sealed chamber 4 and an alloy matrix material 16 comprising FeaCrbPcCd (wherein a is 90-50 atomic%, b is 2-50 atomic% and c+d is 10-30 atomic%) and having a transient metal or other element added thereto if necessary is placed or the target electrode 6. High voltage is applied by current supply to sputter the alloy matrix material of the target electrode 6 to discharge the same in a gaseous state. The ion generated in plasma is accelerated while energized by this strong electric field to allow the discharged atom of the target surface 16 to adhere to the surface of the substrate 15 on the opposed electrode 5. This coating layer is accumulated to form an amorphous alloy layer directly solidified bypassing a molten state.
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