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申请公布号
JPS5940306(B2)
申请公布日期
1984.09.29
申请号
JP19750155259
申请日期
1975.12.25
申请人
NIPPON ELECTRIC CO
发明人
MATSUMOTO KAZUNARI
分类号
H01L29/78;H01L21/28;H01L21/306;H01L21/31;H01L21/336;H01L21/8234;H01L27/06
主分类号
H01L29/78
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