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发明名称
摘要
申请公布号
JPS59145033(U)
申请公布日期
1984.09.28
申请号
JP19830038940U
申请日期
1983.03.17
申请人
发明人
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
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地址
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