| 摘要 |
PURPOSE:To manufacture highly efficiently a digital signal recording and reproducing disk, by installing more than two places of disk taking-out and bringing-in sections and reflecting film forming devices of the same number in the same vacuum vessel and successively performing vapor deposition of reflecting films on the surface of a disk while the disk is held at the outer periphery of a turntable in the vertical direction and the turntable is rotated. CONSTITUTION:Disks 1 are put into a vacuum vessel 11 through a preliminary vacuum chamber 10 and fitted to a disk taking-out and bringing-in position 13 installed to the outer periphery of a turntable 12. The turntable 12 rotates and the disk 1 moves to a sputtering location 14 where Al is sputtered by a target 15 and a reflecting film is formed on the surface of disk 1. Then the turntable further rotates and the disk moves to another disk taking-out and bringing-in position 16, from where the disk 1 is taken out through another preliminary vacuum chamber 17. Simultaneously, another disk 1 is brought to the position 16 through the preliminary vacuum chamber 17. Then the newly brought disk 1 moves to another sputtering location 18 where Al is sputtered by another target 19 and a reflecting film is formed on the surface of the disk 1. Thereafter, the disk 1 is moved to the position 13 and taken out from the vacuum vessel 11 through the preliminary vacuum chamber 10. |
