| 摘要 |
PURPOSE:To improve the adhesion efficiency of a Ti film without deteriorating the C-axis orienting property of the Ti film, when the Ti film is formed on a substrate by vacuum evaporation. CONSTITUTION:A Ti film is formed by making an angle phi1 formed by the incident angle at the initial stage of film formation and the normal line of the substrate larger than the incident angle phi2 at the final stage of film formation, and then, a vertically magnetized film made mainly of Co and Cr is formed on the Ti film directly or through a permalloy film. By making the angle phi2 larger than the incident angle phi1, a Ti film having an excellent C-axis orienting property and a large adhesion efficiency eta is obtained. Even when the incident angle phi2 varies within a range of 3 deg.-35 deg., DELTAtheta50 little changes. On the other hand, when the incident angle phi2 is made larger, the adhesion efficiency eta becomes larger and when, for example, the phi2 is set at 30 deg. the eta becomes about 0.5. In case where the incident angle phi2 is fixed at 10 deg. and the angle DELTA1 is changed, in the next place, any Ti films having a high adhesion efficiency and excellent C- axis orienting property are hardly obtained when the angle phi1 is made larger, because the DELTAtheta50 also becomes larger. |
