| 摘要 |
PURPOSE:To obtain a magneto-optical storage element which prevents a change in the lape of time of a recording medium due to oxidation and stabilizes a holding force by laminating an optical recording layer by a rare earth transition thin metallic alloy film, an AlN film being a transparent dielectric film containing no oxygen, and a reflecting film in order of the foregoing on a substrate. CONSTITUTION:A thin amorphous alloy film 12 of a rare earth transition metallic alloy such as Gd, Tb, Fe, etc. is formed as a magneto-optical effect film on a glass substrate 11. Subsequently, an AlN film 13 which does not cause an oxidation-deterioration of the film 12 is formed by spattering in an N2 gas atmosphere by using Al as a target. Next, a reflecting film 14 is formed on the film 13, and a magneto-optical storage element is obtained. The AlN film 13 is transparent, does not contain O2, is dense and does not make O2 and moisture pass through easily, therefore, an oxidation-deterioration of the film 12 is prevented, and when stainless steel is used for the reflecting film 14, it is excellent in its corrosion resistance, and it does not occur that a hole, etc. are generated due to corrosion by a fingerprint, etc. Also, when recording by a laser light, the heat transmitting property is comparatively small, therefore, a small recording energy will do. In this way, an element which has a corrosion resistance and a good durability is obtained. |
