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发明名称
摘要
申请公布号
JPS5934996(Y2)
申请公布日期
1984.09.27
申请号
JP19790061791U
申请日期
1979.05.11
申请人
发明人
分类号
G03B27/72;G03F1/00;G03F1/54;H01G4/258;H01G7/04;H01L21/027;H01L21/30
主分类号
G03B27/72
代理机构
代理人
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地址
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