| 摘要 |
<p>PURPOSE:To obtain a magnetic recording medium having superior corrosion resistance and durability by forming a thin magnetic metallic film having a metallic oxide layer on the surface on a nonmagnetic support and by forming a protective film on the thin film by plasma polymn. CONSTITUTION:A magnetic metallic thin film A of Co-Ni or the like is formed on a nonmagnetic support such as a polyester film W by vapor deposition or other method, and the surface of the film A is oxidized in a gaseous O2 atmosphere to form a metallic oxide film B. A protective film C is then formed on the film B by the plasma polymn. of CF4, F2C=CF2, CH4, chlorobenzene or the like to manufacture a magnetic recording medium. For example, the film A is formed by diagonal vapor deposition in a vapor deposition chamber 1, and the film B is formed in a glow chamber 5 by applying voltage to an electrode 2 and introducing gaseous O2. The film C is formed in a polymn. chamber 3 by introducing gaseous methane from an inlet 4 and applying high frequency from a high-frequency power source 6 to an electrode 8 after matching in a matching box 7. A lubricating layer is then formed on the film C in a lubricating layer forming chamber 9 by evaporating behenic acid or the like from a crucible 10, and winding is carried out. Thus, a magnetic recording medium having high durability is obtd.</p> |
