| 摘要 |
PURPOSE:To record an electron microscope image with high resolution by irradiating high polymer liquid crystal with an electron beam directly. CONSTITUTION:The high polymer liquid crystal is used while enclosed in a proper cell. This cell consists of, for example, two protection films 3 and 4 sandwiching the liquid crystal 1 from above and below, a spacer 5, and an external frame for fixing them. The protection film 3 on the side where an electron beam 8 is incident should be superior in electron beam transmittivity and light transmittivity. The other protection film 4 sandwiching the liquid crystal 1 is formed by vapor-depositing conductive material. This conductive coating 2 contacts the high polymer liquid crystal 1 and is earthed to the external frame by conductive resin material. When the high polymer liquid crystal 1 is irradiated with an electron beam, the transition of the liquid-crystal structure occurs, which is utilized to record an electron microscope image with high resolution. |
