摘要 |
PURPOSE:To correct the fluctuation of a sensor by constituting respectively a detecting circuit, a pump circuit and a heater circuit of an IC substrate by separating them from a computer and making them intelligent. CONSTITUTION:The fist electrode P1 and second electrode P2 are attached to the main surface 100A of a sensor 100 and these are covered with a porous protecting film. The third electrode P3 is attached to the rear surface 100B and these are covered with an airtight protecting film. A lambda detecting circuit 200 is connected to a bonding pad B1 on the electrode P1, and a bonding pad B4 on the electrode P3 is connected to the other input terminal. The pump circuit 300 is connected to a bonding pad B2 on the electrode P2, and a bonding pad B4 is connected to the other input terminal. A heater 400 and the sensor 100 are connected to the pads B3 and B4. A sequencer 500 controlling the circuits 200, 300 and 400 is connected to each circuit. |