Multiport cryopump.

摘要

© A cryopump installation in which a novel cryopump (20) maintains a work chamber (12) at continuous high vacuum while periodically evacuating a load lock (14) in order to allow transfer of material from the load lock (14) to the work chamber (12) without disruption of the work chamber environment. The cryopump has pumping ports (46) positioned on the radiation shield (50) in order to pump plenum (72) to a high vacuum. Load lock gases enter the cryopump through port (46) and are condensed and adsorbed by the radiation shield (50) and second stage cryopanel (54).