| 摘要 |
PURPOSE:To enable the arbitrary control of the specific surface area of fine silica powder, and to obtain fine silica powder having excellent dispersibility and transparency, by decomposing a volatile silicon compound in a flame at a high reaction temperature. CONSTITUTION:A volatile silicon compound such as silicon tetrachloride, etc. is supplied to a flame together with hydrogen gas and air, etc. and burnt and decomposed at a reaction temperature higher than the melting point of silica to obtain fine silica powder. The specific surface area and the dispersibility of the silica powder can be conrolled mainly by the reaction temperature, and the fine control of the above properties are carried out by adjusting the concentration of the silicon compound in the feed gas, the ratio of oxygen, the ratio of hydrogen, etc.
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