| 摘要 |
PURPOSE:To enable a metallic compound film of capacity-type thin-film humidity sensor to effect measurements with high responsivity, regeneration property and measuring accuracy even under unfavorable conditions of high temperature and solvent- saturated atmosphere, etc., by providing said thin-film with humidity-sensitive property with purpose-conscious change of Ar to O2 ratio and forming by ion-plating process. CONSTITUTION:After installing bottom electrodes 12, 12 in an opposed manner on a non-dielectric substrate 10, such as glass, etc., a high-frequency power is applied by a HF power source 30 between an ionizing electrode 24 and an electrode holding a substrate 10, for example, Al vapor generated from a vaporating source 26 by heating by percussion metalic piece, such as Al, etc. with electron-beams is allowed be introduced towards the substrate 10 from a shield 36 propided with an opening 34. A gas mixture of Ar and O2 with a range of constant ratios Ar:O2=0:10-1:1 is conducted into a vacuum chamber 20 through a valve 40 and Al2O2 film 14 is formed covering the electrodes 11, 12 at 10<-3>-10<-4> Tol. Then, a top electrode 18 is formed on a film 14. Next, a lead wire is connected. Thus, a humidity sensor of high measuring accuracy, pronounced mechanical strengths also can be obtained, even under high-temperature, high- humidity and organic solvent saturated atmosphere. |
