| 摘要 |
PURPOSE:To make it possible to measure the film thickness of a minute area, by coating a material to be measured by a shield plate, which is formed by providing a hole or a slit having a minute area in an aluminum plate, and measuring the thickness of the film of said material to be measured by X-rays. CONSTITUTION:A fluorescent X-ray film thickness gage is set to a measuring area of 0.3phi, and a material to be measured is set on a measuring table. At this time, the material to be measured is coated by a shield plate 1, which is formed by providing a minute hole or a minute slit of 0.3phi in an aluminum plate. Then, specified measurement of the film thickness is performed. In this way, the problem of impossibility of performing accurate film thickness measurement before is solved, and the film thickness measurement of the minute area can be performed. Therefore, this method can be used for the performance check of plating on the minute area and the like. |
