| 摘要 |
PURPOSE:To obtain a stable high speed rotation of a rotor by disposing a magnetic bearing between the lower side of the rotor on the low vacuum side and a rotary body, and utilizing a force in a thrusting direction as a restoring force with respect to the vibration of the rotary body. CONSTITUTION:Permanent magnets 20A and 20B which form a magnetic bearing 20 of permanent magnets are fixed to the lower end of a rotor 12 and the support member 6 of a rotary body 5 opposing thereto. An attracting force Ft in the thrusting direction acts upon the magnetic bearing 20, and when the rotary body 5 vibrates in an inclination mode M, the restoring force to raise the inclined rotary body 5 and tend to restore the same to the original core position becomes Ft. Therefore, a large force Ft toward the thrusting direction can be utilized as the restoring force against the vibration of the rotary body 5, and it enables the rotary body system to make a stable high speed rotation. |
