| 摘要 |
PURPOSE:To execute a measurement of pressure with high accuracy, and also to manufacture easily a titled sensor by constituting simply consisting of an optical waveguide structure formed on a substrate, a means for pressing a part of its structure, and a reflecting means and utilizing a variation of a phase constant by pressure of an optical waveguide. CONSTITUTION:Light is made incident to an input use optical waveguide 13 through an optical fiber from a suitable light source. In case no pressure is applied, phase constants of optical waveguides 1, 11 and 2, 12 are equal. Accordingly, the light which is made incident from the optical waveguide 13 is divided equally and propagated to both optical waveguides 1, 2, returned to the optical waveguide 13 again after being reflected by a reflecting film 7, and an output light is obtained from an optical waveguide 14. When a differential pressure is applied to a diaphragm 8, thickness of the optical waveguide 11 is varied by said pressure, also a refractive index of the optical waveguide 11 is varied by a distortion generated by the pressure, and a phase constant of the optical waveguide 11 is varied. Accordingly, a phase difference is generated in an optical wave propagated through the optical waveguides 1, 11 and the optical waveguides 2, 12, and a light having an intensity corresponding to this phase difference is emitted from the optical waveguide 14. |
