WIRED SUBSTRATE FOR MOUNTING LARGE-SCALE INTEGRATED CIRCUITS USED IN DATA PROCESSING AND COMMUNICATION SYSTEMS

摘要

A fine-wired conductor for use in LSI circuits exhibits good adhesion properties. The conductor is made up of a film of metal such as chrome or titanium on an insulator such as a ceramic substrate, a gold layer over the film of metal and a palladium film on the gold layer. In addition, a palladium layer can be interposed between the metal film and the gold layer to facilitate gold plating and inhibit diffusion of the metal and the gold.