| 摘要 |
PURPOSE:To aim at enlarging the range of a stage and as well as speeding up the stage, by forming, in the inside of a slider, a circumferential hole in which air circulates, and jetting holes for forming a static air pressure bearing, and as well by supporting the coupling member on the slider so that the load of the linear motor is reduced and as well the linear motor is miniaturized. CONSTITUTION:An X-Y stage has a linear motor whose slider 31 is formed with a circumferential hole 32 and holes 33 communicated with the gap (a), and compressed air is fed into the circumferential hole 32 from a tube 34. Further, compressed air from the tube 34 ventilates the circumferential hole 32 and circulates therein, and is as well jetted into the gap (a) through the holes 33. Accordingly, the air-film of the jetted compressed air forms a static air pressure bearing structure, and the air circulating in the circumferential hole 32 cools the slider 31. Therefore, the miniaturization of the X-Y stage and the increase of drive current may be aimed, and since the slider is supported on a rail by means of the static air pressure bearing, the coupling member may be supported only by the slider so that rolling wheels, etc. may be eliminated, thereby the load of the linear motor is reduced. |
