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发明名称
METHOD OF AND DEVICE FOR DETECTING THE POSITION OF AN OBJECT
摘要
申请公布号
GB2075182(B)
申请公布日期
1984.09.19
申请号
GB19810008776
申请日期
1981.03.20
申请人
HITACHI LTD
发明人
分类号
G01B11/00;G01B11/02;G01B11/03;H01L21/66;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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