| 摘要 |
PURPOSE:To enable simultaneous formation of homogeneous thin films on plural samples by connecting electric discharge chambers having the same construction into plural loops and controlling the introduction and discharge of gaseous compd. so that the condition of the gas flowing in each discharge chamber is made equiv. CONSTITUTION:A thin film forming device which decomposes prescribed gaseous compd. by glow discharge and deposits and forms thin films on samples 31-34 is constituted by providing means 21-24 for inducing the glow discharge and connecting chambers 11-14 contg. the samples as unit chambers into plural loops. The gas is introduced from at least one point in each junction between the adjacent unit chambers and the gas is discharged from at least one point in each juncture in the state of passing the gas in all the unit chambers; the introducing and discharging parts for the gas are further successively changed over in one direction of the loops at every specified time. The utilizing efficiency of the gaseous compd. is thus improved and the homogeneous thin film are formed simultaneously on the plural samples. |
