| 摘要 |
PURPOSE:To prevent the sticking of a dry film to a photomask by forming a thin film of a polymer which is insoluble in an org. solvent and soluble in water or an aqueous inorg. salt soln. on the surface of the dry film contacting with the photomask. CONSTITUTION:An aqueous soln. of gelation as a polymer which is insoluble in an org. solvent and soluble in water or an aqueous inorg. salt soln. is coated on a PET support of about 25mum thickness and dried to form a film of 0.8mum thickness. A photosensitive layer contg. a binder resin and a (meth)acrylic ester- base monomer is formed on the gelatin layer. An underlayer may be formed by coating to improve the adhesive property of the gelatin layer to the photosensitive layer. The photosensitive layer is press-bonded to a copper lined glass-epoxy laminate under heating, and the PET film is stripped. The gelatin layer is brought into contact with a photomask, and exposure is carried out. After removing the gelatin layer by washing, the exposed photosensitive layer is developed with 1,1,1-trichloroethane. |
