| 摘要 |
PURPOSE:To highly accurately measure the distance between an object of measurement and a reference surface, by obliquely projecting light on the object, allowing the light reflected by the object to enter a two-dimensional CCD slightly obliquely, and calculating the output of the CCD. CONSTITUTION:The light emitted from a light source 4 passes through a slit 5 and irradiates an object 6 of measurement. The light reflected by the object 6 enters a two-dimensional CCD7 slightly obliquely. The CCD7 is driven by a driving circuit 8. A serial signal 9 is passed through a binary-encoding circuit 10 and is inputted to a position coordinate circuit 12 through a synchronizing signal from an HV synchronizing circuit (a), whereby coordinates are given to the binary-coded signal 11. The position coordinates of the signal 11 are inputted to a distance calculating circuit 14, in which they are calculated, whereby the distance (h) between the object 6 and a reference surface (the lower surface of a lens barrel 1) is highly accurately obtained from the regression lines of the slit image on the CCD7. |
