| 摘要 |
PURPOSE:To reduce the size of the titled device and to improve the efficiency of heat exchange so that heating and thermal insulation are attained even at the time of filtering by forming a flowing channel having a built-in filter on the upper side of a flowing channel having a built-in heater. CONSTITUTION:When a treating solution in a storage tank 20 is made flow from a cylinder 9 to a lower side flow course 18 by a pump 21 and reaches the leading end of a solution detector 11a, electric power is supplied to a heater 7. After heating, the solution is sent from a turning-back part to an upper side flow course 19 and is made flow from the external pheripheral surface of a cylindrical filter 4 into the inside and filtered. The filtered solution is supplied from the flow course 21 to a treating tank 23. Although the treating solution made flow from the cylinder 9 is heated by the heater 7 when passing through the lower side flow course 18, the upper side flow course is also affected by the heater 7 and heated or thermally insulated, so that the efficiency of heat exchange is improved. |
