发明名称 TWO-LUMINOUS FLUX INTERFEROMETER USING REFRACTIVE SCANNING METHOD
摘要 PURPOSE:To perfectly prevent chromatic aberration, by using a movable optical wedge, a fixed optical wedge and a translucent mirror integrated therewith in optical scanning. CONSTITUTION:The light issued from a light source 10 is passed through a movable optical wedge 55 and a fixed optical wedge 45 while converted to parallel luminous flux 14 by a parabolic surface mirror 70 and reflected by the translucent mirror surface 42 on the translucent mirror substrate integrated with the optical wedge 45 while the reflected light is further reflected by a reflective mirror 50 through the optical wedges 45, 55 to be incident to a detector 24 through the optical wedges 45, 55, the translucent mirror 42, the substrate 40 and a light collecting system 65. On the other hand, the parallel luminous flux 14 passing the translucent mirror surface 42 is reflected by the reflective mirror 50 while the reflected luminous flux is again refleced by the translucent mirror 42 to be incident to the detector 24 through the light collecting system 65. Refractive scanning is performed by the movement of the movable optical wedge 55 to the direction of the arrow 56. Because the optical wedges 55, 45 are formed of the same material and the vertical angles beta are made same but the directions thereof are made opposite, chromatic aberration is perfectly prevented.
申请公布号 JPS59164925(A) 申请公布日期 1984.09.18
申请号 JP19830039005 申请日期 1983.03.11
申请人 HITACHI SEISAKUSHO KK 发明人 INOUE KATSU
分类号 G01J3/45;G01J3/453 主分类号 G01J3/45
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