| 摘要 |
PURPOSE:To attain the linearity of pressure/output relation to low pressure by reducing the influences caused by a temp. and excessive pressure, by constituting the titled detector by providing a wiring-exclusive strain generating beam to a wiring electrode while providing no electrode to a strain generating beam for forming a gauge resistor group. CONSTITUTION:Because a wiring electrode 44 can be prevented from being formed on the strain generating beam 36 formed on a gauge resistor 40, the strain generating gauge 36 receives no stress change caused by temp. change and the temp. characteristics thereof are not affected. Even if excessive pressure is applied, because silicon is excellent in elastic characteristics, said beam 36 is perfectly restored when excessive pressure is removed and receives no influence of excessive pressure. In addition, because only the gauge resistor 40 and the aluminum electrode 44 may be formed to the strain generating beams 36, 37, the widths of the strain generating beams 36, 37 can be made narrow. As a result, the ratio occupied by a diaphragm part 38 in a thin strain part becomes large and the linearity of the relation of pressure and output is held to lower pressure. |
