Piezoelectric tuning fork vibrator with reduced vibrational leakage

摘要

A piezoelectric tuning fork vibrator used as an oscillator or a detection element in various electronic circuits, which is provided at a vibrator body with a slit to form tuning fork legs at both sides, one leg at the vibrator having at the outside surface a piezoelectric thin film and an electrode thereon, so that the one leg including the piezoelectric thin film and electrode, is made equal in width to the other leg. Hence, the both side tuning fork legs equal in width become equal in the resonance frequency and avoids leakage of vibration energy, whereby this piezoelectric vibrator is free from characteristic variation and has a high accuracy.