| 摘要 |
PURPOSE:To execute sufficiently an inspection of dimensions of a fine working sample, and also to execute a correction of a faulty part by scanning a generated micro-ion beam on a sample, and detecting a secondary ion or a secondary electron generated from a plane part and a fine groove or opening hole part of the sample, by a collecting device. CONSTITUTION:A micro-ion beam generating device 7 having a scanning mechanism, a sample slight movement control device 8, and a secondary generated ion or electron collecting device 9 for collecting a secondary ion or a secondary electron generated from the surface of a sample 20 by an irradiation of a micro- ion beam are provided. Also, this device is constituted so that a signal sent from the sample slight movement control device 8 and the secondary generated ion or electron collecting device 9 is sent to a data analyzing and display part 10, and fine dimensions are measured. Also, an annular collector for collecting a secondary ion or a secondary electron generated from the sample by an irradiation of a micro-ion beam, or a secondary ion analyzer for analyzing and measuring the secondary ion generated from a groove or the bottom face of an opening hole is provided in the circumference of a micro-ion beam axis of the tip of a micro-ion beam generating device 7. |
