发明名称 SOLID-STATE IMAGE PICKUP ELEMENT
摘要 PURPOSE:To improve the reproducibility of colors and an S/N ratio by coating a section between inter-layer insulating films with a poly-silicon film 11 and forming a light-shielding film. CONSTITUTION:MOS transistor groups consisting of n type sources 2 and drains 3 and gate electrodes 4 are constituted on a p type semiconductor substrate 1. The source 2 also constitutes a photodiode 5 together with the substrate 1, and each photoelectric conversion element composed of the diode 5 and an MOS transistor is insulated by a field oxide film 6 and inter-layer insulating films 7a, 7b, 8, and connected by an Al wiring 9. A polysilicon film 11 is applied and formed between the films 7a, 7b on the diode 5 corresponding to an Al film 10 for shielding light shaped on the film 8.
申请公布号 JPS59163860(A) 申请公布日期 1984.09.14
申请号 JP19830037405 申请日期 1983.03.09
申请人 HITACHI SEISAKUSHO KK 发明人 SUZUKI TOSHIKI
分类号 H01L27/146;H01L31/0216;H01L31/10;H01L31/101 主分类号 H01L27/146
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